JPH0390432U - - Google Patents
Info
- Publication number
- JPH0390432U JPH0390432U JP15215389U JP15215389U JPH0390432U JP H0390432 U JPH0390432 U JP H0390432U JP 15215389 U JP15215389 U JP 15215389U JP 15215389 U JP15215389 U JP 15215389U JP H0390432 U JPH0390432 U JP H0390432U
- Authority
- JP
- Japan
- Prior art keywords
- rings
- static pressure
- reaction tube
- seal portion
- space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003068 static effect Effects 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215389U JPH0390432U (en]) | 1989-12-28 | 1989-12-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15215389U JPH0390432U (en]) | 1989-12-28 | 1989-12-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0390432U true JPH0390432U (en]) | 1991-09-13 |
Family
ID=31698428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15215389U Pending JPH0390432U (en]) | 1989-12-28 | 1989-12-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0390432U (en]) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009252635A (ja) * | 2008-04-09 | 2009-10-29 | Tokyo Electron Ltd | プラズマ処理装置のシール構造、シール方法およびプラズマ処理装置 |
| JP4977690B2 (ja) * | 2006-04-06 | 2012-07-18 | 梅基 正美 | 手押し車用車輪および自在車輪 |
| JP2016004868A (ja) * | 2014-06-16 | 2016-01-12 | 古河機械金属株式会社 | ガス流通管の取付具及び気相成長装置 |
-
1989
- 1989-12-28 JP JP15215389U patent/JPH0390432U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4977690B2 (ja) * | 2006-04-06 | 2012-07-18 | 梅基 正美 | 手押し車用車輪および自在車輪 |
| JP2009252635A (ja) * | 2008-04-09 | 2009-10-29 | Tokyo Electron Ltd | プラズマ処理装置のシール構造、シール方法およびプラズマ処理装置 |
| JP2016004868A (ja) * | 2014-06-16 | 2016-01-12 | 古河機械金属株式会社 | ガス流通管の取付具及び気相成長装置 |